I used Gearotic to cnc machine My Elmers gear engine internal gear. I made it 2x bigger than the plans because I felt it was too small and the endmill required was also too small. I made it out of Delrin. I know you are looking for a single tooth profile, Gearotic does this and the earlier version of Gearotic generated code for producing the cutter. I am not sure if the free version will output the dxf profile but you can try. The software does provide single tooth data. At the time, many years ago the Gearotic licence was less than the Boston gear price for this gear , I purchased the licence and have used it many times, including elliptical and helical gears. And the free version of Gearotic is just fun to play with. Just my 1.414 cents worth.